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Abstract Programmable photonic integrated circuits (PICs) consisting of reconfigurable on-chip optical components have been creating new paradigms in various applications, such as integrated spectroscopy, multi-purpose microwave photonics, and optical information processing. Among many reconfiguration mechanisms, non-volatile chalcogenide phase-change materials (PCMs) exhibit a promising approach to the future very-large-scale programmable PICs, thanks to their zero static power and large optical index modulation, leading to extremely low energy consumption and ultra-compact footprints. However, the scalability of the current PCM-based programmable PICs is still limited since they are not directly off-the-shelf in commercial photonic foundries now. Here, we demonstrate a scalable platform harnessing the mature and reliable 300 mm silicon photonic fab, assisted by an in-house wide-bandgap PCM (Sb₂S₃) integration process. We show various non-volatile programmable devices, including micro-ring resonators, Mach-Zehnder interferometers and asymmetric directional couplers, with low loss (~0.0044 dB/µm), large phase shift (~0.012 π/µm) and high endurance (>5000 switching events with little performance degradation). Moreover, we showcase this platform’s capability of handling relatively complex structures such as multiple PIN diode heaters in devices, each independently controlling an Sb₂S₃segment. By reliably setting the Sb₂S₃segments to fully amorphous or crystalline state, we achieved deterministic multilevel operation. An asymmetric directional coupler with two unequal-length Sb₂S₃segments showed the capability of four-level switching, beyond cross-and-bar binary states. We further showed unbalanced Mach-Zehnder interferometers with equal-length and unequal-length Sb₂S₃segments, exhibiting reversible switching and a maximum of 5 ($$N+1,N=4$$ $N+1,N=4$) and 8 ($${2}^{N},N=3$$ $2^N,N=3$) equally spaced operation levels, respectively. This work lays the foundation for future programmable very-large-scale PICs with deterministic programmability. 

Abstract Scalable programmable photonic integrated circuits (PICs) can potentially transform the current state of classical and quantum optical information processing. However, traditional means of programming, including thermo-optic, free carrier dispersion, and Pockels effect result in either large device footprints or high static energy consumptions, significantly limiting their scalability. While chalcogenide-based non-volatile phase-change materials (PCMs) could mitigate these problems thanks to their strong index modulation and zero static power consumption, they often suffer from large absorptive loss, low cyclability, and lack of multilevel operation. Here, we report a wide-bandgap PCM antimony sulfide (Sb₂S₃)-clad silicon photonic platform simultaneously achieving low loss (<1.0 dB), high extinction ratio (>10 dB), high cyclability (>1600 switching events), and 5-bit operation. These Sb₂S₃-based devices are programmed via on-chip silicon PIN diode heaters within sub-ms timescale, with a programming energy density of$$\sim 10\,{fJ}/n{m}^{3}$$ $~10fJ/n{m}^3$. Remarkably, Sb₂S₃is programmed into fine intermediate states by applying multiple identical pulses, providing controllable multilevel operations. Through dynamic pulse control, we achieve 5-bit (32 levels) operations, rendering 0.50 ± 0.16 dB per step. Using this multilevel behavior, we further trim random phase error in a balanced Mach-Zehnder interferometer. 

We propose and simulate a compact (∼29.5 µm-long) nonvolatile polarization switch based on an asymmetric Sb₂Se₃-clad silicon photonic waveguide. The polarization state is switched between TM₀and TE₀mode by modifying the phase of nonvolatile Sb₂Se₃between amorphous and crystalline. When the Sb₂Se₃is amorphous, two-mode interference happens in the polarization-rotation section resulting in efficient TE₀-TM₀conversion. On the other hand, when the material is in the crystalline state, there is little polarization conversion because the interference between the two hybridized modes is significantly suppressed, and both TE₀and TM₀modes go through the device without any change. The designed polarization switch has a high polarization extinction ratio of > 20 dB and an ultra-low excess loss of < 0.22 dB in the wavelength range of 1520-1585 nm for both TE₀and TM₀modes. 

We report a hybrid phase-change mateial Sb₂S₃-silicon photonic tunable directional coupler, which exhibits low insertion loss (< 1.0 dB), large extinction ratio (> 10 dB), high endurance (> 1,600 switching events), and 32 operation levels. 

We propose a nanogap-enhanced phase-change waveguide with silicon PIN heaters. Thanks to the enhanced light-matter interaction in the nanogap, the proposed structure exhibits strong attenuation (Δα = ∼35 dB/µm) and optical phase (Δn_eff = ∼1.2) modulation atλ = 1550 nm when achieving complete phase transitions. We further investigate two active optical devices based on the proposed waveguide, including an electro-absorption modulator and a 1 × 2 directional-coupler optical switch. Finite-difference time-domain simulation of the proposed modulator shows a high extinction ratio of ∼17 dB at 1550 nm with an active segment of volume only ∼0.004λ³. By exploiting a directional coupler design, we present a 1 × 2 optical switch with an insertion loss of < 4 dB and a compact coupling length of ∼ 15 µm while maintaining small crosstalk less than −7.2 dB over an optical bandwidth of 50 nm. Thermal analysis shows that a 10 V pulse of 30 ns (1×1 modulator) and 55 ns (1×2 switch) in duration is required to raise the GST temperature of the phase-change waveguide above the melting temperature to induce the amorphization; however, the complete crystallization occurs by applying a 5 V pulse of 180 ns (1×1 modulator) and a 6 V pulse of 200 ns (1×2 switch), respectively.